High-precision linear stage vertical 5-axis stage
High-precision linear stage vertical 5-axis stage
Optimal 5-axis stage for vertical exposure devices 【Features】 ○ A multi-axis stage equipped with Z-axis, θ-axis, and tilting functions in addition to the XY axes ○ Equipped with functions necessary for mask alignment ○ Designed for vertical placement, enabling particle-free operation ○ Can be used in a space-saving manner ● For other functions and details, please download the catalog.
- Company：ウイング
- Price：Other
